https://cdn.specpick.com/images/photonics/laytecvscel_wall.jpg712370
III-V compound semiconductor expert, Visual Photonics Epitaxy Co. (VPEC) of Taiwan has chosen LayTec’s advanced in-situ metrology products for its VCSEL production.
Supporting the global VCSEL chip demand for 3D sensing and other rapidly growing applications, LayTec’s dedicated VCSEL Add-On to EpiTT and EpiCurve TT provides additional in-situ spectral reflectance sensing and can be customized in wavelength range for GaAs based and InP based NIR / IR VCSEL processes. It enables high-yield manufacturing of these very complex multi-layer device structures.
The LayTec VCSEL Add-On is also available as an upgrade to existing EpiTT or EpiCurve TT systems. Equipped with advanced real-time analysis algorithms it monitors DBR stop-bands and cavity dip position during VCSEL epitaxy in addition to EpiTT’s wafer temperature and growth rate, as well as EpiCurve TT’s wafer bow measurements.
Visual Photonics Epitaxy Co. was founded on November 26th, 1996 by an excellent group of enterprising members. The new company comprised of specialists in optoelectronics, microelectronic engineering, chemistry, and material science, all with industrial experience and theoretical knowledge in the III-V compound semiconductor field. These technical experts produce HBT, PHEMT, BiHEMT PD, LD, VCSEL and solar cell epi wafer using MOCVD (Metal Organic Vapor Phase Epitaxy) technology.
According to Neil Chen (VPEC – President office SVP), VPEC chose LayTec’s market leading in-situ process technology for VCSEL wafer manufacturing as an essential part for accomplishing high standards in quality and yield. Combining existing control of wafer temperature, wafer bow and growth rates with the new spectral monitoring capabilities is a key for VCSEL foundries in terms of process transfer, rapid recipe changes and scaling up.