The IMS5400-DS from Micro-Epsilon is a White Light Interferometer that can measure a thickness of 0.01 mm - 1.3 mm. It has a resolution of less than 1 nm and continuously adjustable rate from 100 Hz to 6 kHz. This interferometer has a NIR-SLED light source with a wavelength of 840 nm and pilot laser of wavelength 635 nm. It has a linearity of up to ± 50 nm and measuring angle of ± 2°. This interferometer uses a class 1 (pilot) laser with a light spot diameter of 10 µm.

The IMS5400-DS comes with IP65 (sensor) & IP40 (controller) protection and has an optional Ultra High Vacuum (UHV). This interferometer has a 16-bit D/A converter and can be controlled via Ethernet, EtherCAT, RS422, PROFINET, or EtherNet/IP interfaces. It requires a DC supply voltage of 24 V and consumes 10 W of power. This interferometer is available in an aluminum housing that measures Φ10 x 55 mm and is ideal for industrial distance measurement applications.