Interferometer by Micro-Epsilon

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The IMS5400-TH70 from Micro-Epsilon is a White Light Interferometer that is designed for industrial thickness measurement. It can measure a thickness of 0.035-1.4 mm from a distance of up to 70 mm and at a continuously adjustable rate of 100 Hz to 6 kHz. This interferometer has a NIR-SLED light source of wavelength 840 nm that can measure even the thickness of optically non-dense objects such as anti-reflective coated glass.

The IMS5400-TH70 provides the decisive advantage of distance-independent measurement which results in a stable nanometer-accurate thickness value. The target can move within its measuring range without influencing the accuracy. This interferometer's thickness measuring range also allows the measurement of thin layers, flat glass, and films. It requires a DC supply of 24 V and consumes 10 W of power. This interferometer is available in an aluminum housing that measures Φ10 x 55 mm.

Product Specifications

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Product Details

  • Part Number
  • Manufacturer
  • Description
    White Light Interferometer for Stable Thickness Measurement

General Parameters

  • Type
    White light interferometer
  • Measurement Type
  • Wavelength
    840 nm
  • Measuring Length
    0.035 to 1.4 mm
  • Laser Source
    NIR-SLED, wavelength 840 nm
  • Power Consumption
    10 W
  • Power Supply
    24 VDC ±15 %

Connections & Interface

  • Interface
    Ethernet, EtherCAT, RS422, PROFINET, EtherNet/IP

Environmental Conditions

  • Operating Temperature
    5 to 70 Degree C
  • Storage Temperature
    -20 to 70 Degree C


  • Applications
    Thickness Measurement

Technical Documents

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