The IMS5600-DS from Micro-Epsilon is a White Light Interferometer that has a measuring range of 2.1 mm. It has a resolution of less than 30 pm and continuously adjustable rate of 100 Hz - 6 kHz. This interferometer has an NIR-SLED light source with a wavelength of 840 nm and pilot laser of wavelength 635 nm. It has a linearity of up to ± 10 nm and measuring angle of ± 2°. This interferometer uses a class 1 (pilot) laser with a light spot diameter of 10 µm.
The IMS5600-DS comes with IP65 (sensor) & IP40 (controller) protection and has an optional Ultra High Vacuum (UHV). This interferometer has a 16-bit D/A converter and can be controlled via Ethernet, EtherCAT, RS422, PROFINET, or EtherNet/IP interfaces. It requires a DC supply voltage of 24 V and consumes 10 W of power. This interferometer is available in an aluminum housing that measures &Phi10 x 55 mm and is ideal for industrial distance measurement applications.