Interferometer by Micro-Epsilon

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The IMS5600-DS from Micro-Epsilon is a White Light Interferometer that has a measuring range of 2.1 mm. It has a resolution of less than 30 pm and continuously adjustable rate of 100 Hz - 6 kHz. This interferometer has an NIR-SLED light source with a wavelength of 840 nm and pilot laser of wavelength 635 nm. It has a linearity of up to ± 10 nm and measuring angle of ± 2°. This interferometer uses a class 1 (pilot) laser with a light spot diameter of 10 µm.

The IMS5600-DS comes with IP65 (sensor) & IP40 (controller) protection and has an optional Ultra High Vacuum (UHV). This interferometer has a 16-bit D/A converter and can be controlled via Ethernet, EtherCAT, RS422, PROFINET, or EtherNet/IP interfaces. It requires a DC supply voltage of 24 V and consumes 10 W of power. This interferometer is available in an aluminum housing that measures &Phi10 x 55 mm and is ideal for industrial distance measurement applications.

Product Specifications

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Product Details

  • Part Number
  • Manufacturer
  • Description
    White Light Interferometer for Distance Measurement Applications

General Parameters

  • Type
    White light interferometer
  • Measurement Type
    Length, Distance
  • Wavelength
    840 nm
  • Measuring Length
    2.1 mm
  • Laser Source
    NIR-SLED, wavelength 840 nm
  • Power Consumption
    10 W
  • Power Supply
    24 VDC ±15 %

Connections & Interface

  • Interface
    Ethernet, EtherCAT, RS422, PROFINET, EtherNet/IP

Environmental Conditions

  • Operating Temperature
    5 to 70 Degree C
  • Storage Temperature
    -20 to 70 Degree C


  • Applications
    Distance Measurement

Technical Documents

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