EX50

Laser by GAM LASER

Note: Your Quotation Request will be directed to GAM LASER.

The EX50 from GAM LASER is a Laser with Wavelength 157, 193, 248, 308, 351 nm, Power 0.5 to 1 W, 5 to 10 W, 10 to 20 W, 5 to 10 W, 5 to 9 W(F2, ArF, KrF, XeCl, XeF), Output Power (Pulsed) 0.5 to 1 W, 5 to 10 W, 10 to 20 W, 5 to 10 W, 5 to 9 W(F2, ArF, KrF, XeCl, XeF), Pulse Energy 2.5, 35, 50, 22, 20 mJ(F2, ArF, KrF, XeCl, XeF). More details for EX50 can be seen below.

Product Specifications View similar products

Product Details

  • Part Number
    EX50
  • Manufacturer
    GAM LASER
  • Description
    EX50 EXCIMER LASER

General Parameters

  • Configuration
    Laser Head with Control Unit (Integrated)
  • Type
    Laser System
  • Technology
    Excimer Laser, Gas Laser
  • Operation Mode
    Pulsed Laser
  • Ultrafast Laser
    Nanosecond Lasers
  • Wavelength
    157, 193, 248, 308, 351 nm
  • Tunable
    No
  • Fiber Coupled
    No
  • Laser Color
    Ultraviolet
  • Power
    0.5 to 1 W, 5 to 10 W, 10 to 20 W, 5 to 10 W, 5 to 9 W(F2, ArF, KrF, XeCl, XeF)
  • Output Power (Pulsed)
    0.5 to 1 W, 5 to 10 W, 10 to 20 W, 5 to 10 W, 5 to 9 W(F2, ArF, KrF, XeCl, XeF)
  • Pulse Energy
    2.5, 35, 50, 22, 20 mJ(F2, ArF, KrF, XeCl, XeF)
  • Pulse Width
    17-20 ns
  • Application
    Pulsed laser deposition, Ionization, Micromachining
  • Repetition Rate
    250/ 500/ 750/ 1000/ 2000 Hz
  • Gain Medium Type
    Gas
  • Laser Gain Medium
    F2, ArF, KrF, XeCl, XeF
  • Application Industry
    Semiconductors & Microelectronics
  • Beam Divergence
    0.8 X 1.6 mRad
  • Pulse Energy
    2.5, 35, 50, 22, 20 mJ(F2, ArF, KrF, XeCl, XeF)
  • Power Supply
    250/ 500Hz 95-240 VAC, 8/15A, 47/63Hz 1000Hz 208-240 VAC 15A 47/63Hz

Physical Properties

  • Dimension
    78 X 43 X 34cm (L X W X H)
  • Weight
    48 Kg
  • Beam Area
    9 x 4 mm

Environmental Conditions

  • Cooling Method
    Air-Cooled 250,500 Hz/ Water-Cooled 1000Hz

Technical Documents

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