EX50LN

Laser by GAM LASER

Note: Your Quotation Request will be directed to GAM LASER.

The EX50LN from GAM LASER is a Laser with Wavelength 157, 193.3, 248.35, 308 to 311 nm, 351 to 533 nm, Power 0.3 to 1.5 W, 0.75 to 4 W, 0.3 to 2 W(ArF/KrF/XeCl), Output Power (Pulsed) 0.3 to 1.5 W, 0.75 to 4 W, 0.3 to 2 W(ArF/KrF/XeCl), Pulse Energy 4, 15, 25, 15, 10 mJ(F2, ArF, KrF, XeCl, XeF). More details for EX50LN can be seen below.

 Product Specifications

    Product Details

    • Part Number :
      EX50LN
    • Manufacturer :
      GAM LASER
    • Description :
      Highly Line Narrowed Excimer Laser

    General Parameters

    • Configuration :
      Laser Head with Control Unit (Integrated)
    • Type :
      Laser System
    • Technology :
      Excimer Laser, Gas Laser
    • Operation Mode :
      Pulsed Laser
    • Wavelength :
      157, 193.3, 248.35, 308 to 311 nm, 351 to 533 nm
    • Tunable :
      No
    • Fiber Coupled :
      No
    • Laser Color :
      Ultraviolet
    • Power :
      0.3 to 1.5 W, 0.75 to 4 W, 0.3 to 2 W(ArF/KrF/XeCl)
    • Output Power (Pulsed) :
      0.3 to 1.5 W, 0.75 to 4 W, 0.3 to 2 W(ArF/KrF/XeCl)
    • Pulse Energy :
      4, 15, 25, 15, 10 mJ(F2, ArF, KrF, XeCl, XeF)
    • Application :
      SPECTROSCOPY SEMICONDUCTOR METROLOGY OPTICAL TESTING
    • Repetition Rate :
      125 Hz, 250 Hz, 500 Hz, 750 Hz
    • Laser Gain Medium :
      F2, ArF, KrF, XeCl, XeF
    • Beam Divergence :
      1 X 2 mRad
    • Pulse Energy :
      4, 15, 25, 15, 10 mJ(F2, ArF, KrF, XeCl, XeF)

    Physical Properties

    • Beam Area :
      8 x 4 mm

    Environmental Conditions

    • Cooling Method :
      Air-Cooled / Water-Cooled

    Technical Documents

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