GT61A

Laser by Gigaphoton

Note: Your Quotation Request will be directed to Gigaphoton.

The GT61A from Gigaphoton is an Excimer Laser that operates at a wavelength of 193 nm. It delivers an average output power of 60 W and has a spectral bandwidth of 0.35 pm. This laser has a pulse energy of 10 mJ and repetition rate of 6000 Hz. It features injection-locking platform and has longer laser chamber life to reduce downtime & maintenance cost. This laser has high-precision measuring instrument & stabilization mechanism for highly stable spectrum and is ideal for hyper N.A. immersion lithography tools.

Product Specifications

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Product Details

  • Part Number
    GT61A
  • Manufacturer
    Gigaphoton
  • Description
    193 nm Excimer Laser for Hyper N.A. Immersion Lithography Tools

General Parameters

  • Configuration
    Laser Head with Control Unit (Integrated)
  • Type
    Laser System
  • Technology
    Excimer laser
  • Operation Mode
    Pulsed Laser
  • Power
    60 W
  • Wavelength
    193 nm
  • Tunable
    No
  • Fiber Coupled
    No
  • Laser Color
    Ultraviolet
  • Pulse Energy :
    10 mJ
  • Gain Medium Type
    Gas Laser
  • Laser Cavity Material
    ArF
  • Laser Gain Medium
    Excimer Laser
  • Application Industry
    Automotive / Industrial & Manufacturing
  • Repetition Rate
    6000 Hz
  • Bandwidth
    0.35 pm
  • Pulse Energy
    10 mJ

Technical Documents

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