Laser by Gigaphoton

Note: Your Quotation Request will be directed to Gigaphoton.

The GT61A from Gigaphoton is an Excimer Laser that operates at a wavelength of 193 nm. It delivers an average output power of 60 W and has a spectral bandwidth of 0.35 pm. This laser has a pulse energy of 10 mJ and repetition rate of 6000 Hz. It features injection-locking platform and has longer laser chamber life to reduce downtime & maintenance cost. This laser has high-precision measuring instrument & stabilization mechanism for highly stable spectrum and is ideal for hyper N.A. immersion lithography tools.

Product Specifications

View similar products

Product Details

  • Part Number
  • Manufacturer
  • Description
    193 nm Excimer Laser for Hyper N.A. Immersion Lithography Tools

General Parameters

  • Configuration
    Laser Head with Control Unit (Integrated)
  • Type
    Laser System
  • Technology
    Excimer laser
  • Operation Mode
    Pulsed Laser
  • Power
    60 W
  • Wavelength
    193 nm
  • Tunable
  • Fiber Coupled
  • Laser Color
  • Pulse Energy :
    10 mJ
  • Gain Medium Type
    Gas Laser
  • Laser Cavity Material
  • Laser Gain Medium
    Excimer Laser
  • Application Industry
    Automotive / Industrial & Manufacturing
  • Repetition Rate
    6000 Hz
  • Bandwidth
    0.35 pm
  • Pulse Energy
    10 mJ

Technical Documents

Click to view more product details on manufacturer's website
Need Help Finding a Product?

Looking for a Product or Supplier?

Let us know what you need, we can help find products that meet your requirement.