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SXUV5

Photodiode by Opto Diode Corporation
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The SXUV5 from Opto Diode Corporation is an EUV (Extreme Ultraviolet) Circular Photodiode with an active area of 5 mm2. This high-speed photodiode features superior 13.5 nm photolithography capability with stable responsivity in extreme UV e

Product Specifications

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Product Details

  • Part Number
    SXUV5
  • Manufacturer
    Opto Diode Corporation
  • Description
    2.5 mm2 Circular Active Area EUV Detectors for Photolithography Applications

Applications

  • Application
    Photolithography

General Parameters

  • Configuration
    Single
  • Channels
    Single
  • Module
    No
  • Package
    TO-5 Package
  • Package Type
    TO-Can
  • Photodetector Type
    PIN
  • Operation Mode
    Photoconductive
  • Wavelength Range
    1 to 90 nm
  • Response Time :
    1 to 2 nsec.
  • Reverse Voltage
    5 to 20 V
  • RoHs
    Yes
  • Shunt Resistance
    20 MOhms
  • Spectral Band
    Extreme Ultraviolet (EUV)
  • Capacitance
    500 to 1500 pF
  • Dark Current
    0 to 1.2 nA
  • Responsivity/Photosensitivity
    0 to 0.34 A/W
  • Note
    Responsivity to 1 nm, Circular Active Area

Physical Properties

  • Active Area
    5 mm2
  • Active Area Diameter
    2.5 mm

Temperature

  • Operating Temperature display
    -10 to 40 Degree C
  • Storage Temperature
    -20 to 80 Degree C

Technical Documents
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