As early as 1992, we started the first large-scale project developing, building and installing an in-vacuum spectrometer as in-situ diagnostics for fusion experiments. Since then we realized nearly 500 projects of customized vacuum systems for deposition of functional layers and for optical applications.
250 eV - 1700 eV, Spherical Grating Monochromator for Soft X-Ray Spectrometer
May 19, 2025