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Leading developers of light sources used in semiconductor lithography, Gigaphoton Inc, have added two new models to its ArF and KrF product lineups. The ArF immersion “GT66A” and the KrF “G60K” light sources will bring the very latest technologies to semiconductor lithography manufacturing.

With an increase in semiconductor applications due to rapidly emerging IoT and AI business growth, semiconductor chips are required to support even faster communication speeds and data process capabilities. Especially in 2020, 5G (5th generation mobile communication) services will be launched for general consumer use, meaning sub-10-nm node compact, high speed, and low power consumption logic ICs as well as large capacity memory chips for storing rapidly increasing amounts of data will be required.

The new GT66A ArF immersion laser is equipped with a newly developed optical module to reduce spatial coherence and improve beam uniformity on the exposed surface. The G60K KrF light source has undergone a full model change for the first time in about 15 years. Power output has been increased by a factor of 1.5x compared to the existing model by introducing a new power supply unit. Gigaphoton supports all chip manufacturers through these new technologies.

Since it was founded in 2000, Gigaphoton has delivered valuable solutions to semiconductor manufacturers throughout the world as a laser supplier. In every stage from R&D to manufacture, sales, and maintenance services, the company has been committed to providing world-class support delivered from the perspective of everyday users.