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Leading UV LED company from Japan, Nitride Semiconductors, has announced the development of world’s first UV-LED (NS365L-9RXT) for use as a light source in exposure systems in semiconductor and PCB manufacturing.
UV lamps containing mercury are still used in semiconductor exposure machines, but in addition to functional restrictions such as long standby time, short lifetime, low UV illuminance stability, and inconvenient on / off control. Therefore, it is expected that the United Nations Environment Program Minamata Convention will promote switching to semiconductor (LED) light sources due to environmental issues.
Features of the New UV-LED, the NS365L-9RXT:
- Energy Saving, Long Life - High efficiency, energy saving and long-life wavelength 365nm UV-LED chip is adopted, so UV output 3.2W (If: 3A, Vf: 4.6V) is demonstrated.
- Narrow Directional Angle Suitable for Semiconductor Exposure - Parallel light is required for accurate exposure, but UV-LED light sources generally have a wide directional angle (about 120°), and the amount of light captured for exposure tends to be insufficient. Therefore, by combining a deep reflector with a lens of high UV transmittance, we have achieved a directional angle of 15° or less. This makes it possible to exchange the UV ramp light source of the conventional exposure machine with UV-LEDs instead of purchasing new UV-LED exposure machines.
- Compact - Size is very compact with a length of 9 mm x width of 9 mm x height of 8.5 mm, so mounting density can be increased.
- Inexpensive - The unit price per 10,000 mass production is around USD50.
Click here to know more about the UV-LED, NS365L-9RXT.
