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VTT has acquired a new SemiProbe Test System to perform automatic and simultaneous Electro-Optical tests at Wafer Level (E/O WLT). The new and improved system will support both research and the SiPh production activities at VTT Memsfab.

The system, installed and operational at Micronova facility is able to handle 6"and 8" wafers and can be loaded with 2 full cassettes (25 wafers each) containing several hundred-thousands of E/O devices to test. Test data are automatically acquired in customer-specified formats and let them available for analytics almost in real time, providing essential feedback and better understanding about production yield, process tuning needs or possible new chip design iterations.

The prober is also expected to work with a minimum level of surveillance during day shifts and be completely unmanned along the overnight shift, after loading operations.  Leveraging on their expertise, VTT want to continuously improve the quality of complex testing services they are offering to customers. VTT is excited to use this automatic probing station where they contribute applying unique fiber probing and alignment know-how, allowing the machine to simultaneously probe each device optically and electrically (RF up to 50 GHz).

In 2016 VTT delivered thousands of SiPh chips for its customers. In 2018, the volume is targeted to reach more than 1 million tested chips and thus E/O Wafer Level Test is vital in their R&D and manufacturing value chains.