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Large Holographic Grating Inspection With High Accuracy XY Stages

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Large Holographic Grating Inspection With High Accuracy XY Stages

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A Newport customer fabricates large gratings with holographic technique. In the process of grating inspection, high accuracy of motion becomes is of key importance in examining the micro-defect. As the provision of a high precision test report is required on each delivered grating, the customer is challenged to design a new inspection method and tools to improve grating quality. Newport provided the custom XY solution to help meet all the needs.

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