E-track™ : Active Pulse Energy Control for Explorer® One™ Lasers

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Achieving higher precision and improved throughput in industries such as microelectronics is the key to a competitive advantage. Striving for higher precision increases the need for laser based tools used in these manufacturing processes. Precise deposition of energy, short response times, and stabilized laser pulse energy control over short or long process periods are key enablers for precision manufacturing capabilities now possible with the new E-Track feature for the Explorer One lasers. E-Track is a closed-loop control algorithm that, for the first time, is commercially available on actively Q-switched DPSS lasers. Highly advanced electronics circuitry of the Explorer One laser enables single pulse energy measurement across the full repetition range and delivers feedback into the laser control algorithm.