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UHV environments require more from motion systems

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UHV environments require more from motion systems

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  • Author: Milan Zeman, Jay Titus
This paper presents work we have recently completed on motion systems for these environments and will review critical design features, appropriate selection and preparation of materials, and qualification testing methods. Comparison test results for both standard and UHV qualified devices and new directions we are taking to improve the vacuum performance further are also presented.

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