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MEMS Mirrors

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MEMS Mirrors

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The mirror is supported by beams called torsion bars. The torsion bar serves as the axis of rotation and also as a torsion spring for suppressing mirror rotation. When current flows through the coil around the mirror, a torque that rotates the mirror (Lorentz force) is produced, and an elastic force of the torsion bar spring is exerted in the opposite direction. The rotation of the mirror stops when these two forces balance each other. The mirror's angle can be changed by varying the magnitude of the current flowing through the coil to control the torque.

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