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MEMS-FPI Spectrum Sensors Spectroscopic Modules

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MEMS-FPI Spectrum Sensors Spectroscopic Modules

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The MEMS-FPI spectrum sensor is composed of a MEMS-FPI tunable filter, photosensor (photodiode), and the like. It has a simple structure in which a MEMS-FPI tunable filter and photosensor is arranged on the same axis as the direction of the incident light. Though this product is a spectral sensor, it uses a single photosensor device and does not require an expensive multichannel photosensor. The MEMS-FPI tunable filter has an upper mirror and a lower mirror that are placed opposite each other with an air gap in between them.

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