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Sine or Square Wave

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Sine or Square Wave

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  • Author: Dr. M. Heintze
The current experimental findings are consistent with the few data in the literature: There is some influence of the waveform on the thin film growth, but it is expected that other unavoidable factors, such as the changing magnetic field with target erosion are much more pronounced. Therefore, the differences found are virtually irrelevant for the choice of power supply.

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