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Precision In Processing

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Precision In Processing

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  • Author: Dr. C. Bock, A. Abt
Moore’s law requires enduring improvements in semiconductor manufacturing processes to ensure a continuous decrease of size. This in turn requires RF generators – the energy source for semiconductor manufacturing plasma processes – to deliver RF power with ever higher signal quality in respect of output power and time resolution. However, quality is costly. At the same time, suppliers of RF generators are under constant pressure to lower costs. This conflict in objectives is a classical engineering challenge that must be solved through innovation. In this paper, we will describe the main aspects of delivering accurate power levels to plasma chambers and measurement results regarding the newest generation of TRUMPF Hüttinger generators.

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