Application of Pulsed-DC Sputtering In CIGS Production
The aim of this report is the analysis of the applicability of Pulsed-DC technology in the modern industrial production lines of CIGS cells at various process steps. Several industrial application examples will be discussed, focusing on power delivery stability, unique arc suppression algorithms, and other advanced features of the up-to-date Pulsed-DC plasma generators such as reverse voltage. The experimental data will serve to analyze the influence of these features on the stability and repeatability of the sputtering process as well as their contribution to production yield increase through the ability to work at elevated power.
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