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Advanced Position Encoders in Photolithography

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Advanced Position Encoders in Photolithography

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Photolithography, meaning printing with light, is widely used in the semiconductor manufacturing industry and many other nanotechnology applications where high-throughput production machines are required to keep pace with the demand for ever-smaller microelectronic devices. This article explores the use of position feedback in modern photolithography and potential applications for the latest optical encoder systems, alongside traditional laser-based encoder systems, which give the machine designer the greatest scope to minimise machine footprint without compromising performance.

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