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New Metrology Techniques for Advanced Thin Film Optical Filters

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New Metrology Techniques for Advanced Thin Film Optical Filters

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  • Author: Alluxa Engineering Staff
Alluxa’s thin film optical filter technology has advanced to the point where the spectral slopes and blocking levels are challenging even the best metrology equipment and techniques. This paper discusses the issues and provides solutions to measuring the spectral response of this new class of high performance filters.

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