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Thin Film Deposition

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Thin Film Deposition

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The thin films that are used to fabricate microelectronic devices are all formed using some kind of deposition technology where the term refers to the formation of a deposit on a substrate. Chemical vapor deposition processes can be defined as any process in which a thin solid film is formed on a substrate by the surface-mediated reaction of adsorbed precursors from the gas phase. The reactive nature of CVD processes distinguishes them from physical processes such as evaporation and sputtering that are employed in PVD.

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