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Dissolved Ozone Delivery Systems for Flat Panel Display Production

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Dissolved Ozone Delivery Systems for Flat Panel Display Production

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Current trends in flat panel display markets clearly show a move towards increased use of high-resolution LCD and OLED technology. This technology cannot be produced using standard a-Si TFT technology and the industry is therefore undergoing a shift to LTPS-TFT for switching and brightness control in advanced FPDs. TFT electrical characteristics in devices fabricated using LTPS technology are critically dependent on the cleanliness of the substrate and a-Si film prior to excimer laser annealing. Contamination by metals and carbon, especially, degrade the performance of TFTs produced using LTPS.

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