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Aluminium Contamination Reduction In 1980’s Vintage Ion Implanters

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Aluminium Contamination Reduction In 1980’s Vintage Ion Implanters

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  • Author: John Schuur
f semiconductor devices is a common and well characterized process. The nature of contamination by atoms other than the desired component of the implantation process is also reasonably well characterized. However there are application specific processes where control of contamination requires that additional measures be taken

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