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Ion Implanter Cross Contamination And Maintenance Safety Considerations With High Dose Phosphorus

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Ion Implanter Cross Contamination And Maintenance Safety Considerations With High Dose Phosphorus

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  • Author: Ron Eddy, Brett Ostrowski, Ming Hong Yang, Darryl Huntington
The safety protocols for proper handling of Phosphine and Arsine gas bottles are well documented [4,5]. These protocols have remained essentially unchanged with the introduction in late 1992 of subatmospheric gas delivery systems [5,6]. Many fabs use solid materials (elemental Arsenic, elemental Antimony and other solids) in a vaporizer to make a gaseous state available in the ion source, due often to company or local regulations. This study is a result of data and information collected at many locations and from results at an implant foundry where a higher than normal % of Phosphorus is run.

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