1.  Home
  2. Whitepapers
  3. Characterization Of A Small form Factor Multipole RGA for Process Chamber Monitoring And for Reduction In Time To Complete Routine Preventive Maintenance

Characterization Of A Small form Factor Multipole RGA for Process Chamber Monitoring And for Reduction In Time To Complete Routine Preventive Maintenance

Download Whitepaper

Characterization Of A Small form Factor Multipole RGA for Process Chamber Monitoring And for Reduction In Time To Complete Routine Preventive Maintenance

Download Whitepaper
  • Author: Ron Johnson, Brannon Winningham, John Schuur
The application of RGA systems to ion implanters is a natural fit. The high vacuum and simple nature of introduced species of an ion implanter is an environment that can be well studied by an RGA. Horiba/STEC manufacture a small form-factor, multipole RGA system which offers variations in performance that is dependent on the chosen sensor head. Intrusion of the sensor head into the vacuum chamber is minimal and less than 5 cm. Protrusion from the vacuum chamber is also much smaller than on conventional RGA systems and is less than 15 cm. The small size allows for novel sensor placement and easy portability between systems or vacuum subsystems on a given machine.

Download Whitepaper Now