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Correlation Of Beam Transport Characteristics And Mass Resolving Power To Analyzing Magnet Pole Piece Wear In Axcelis HE Ion Implanters

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Correlation Of Beam Transport Characteristics And Mass Resolving Power To Analyzing Magnet Pole Piece Wear In Axcelis HE Ion Implanters

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  • Author: Ron Johnson, John Schuur, Randy Tysinger
An investigation into odd analyzing magnet tuning behavior on an Axcelis HE ion implanter revealed a correlation to excessive wear on the analyzer magnet pole pieces. Though the lifetime is generally quite good, the pole pieces are internal to the beamline design and are exposed to and sputtered by the ion beam during mass analysis. This erosion of the pole piece surfaces affects beam focus and transport, especially for lower current ion beams.

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