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Molybdenum Contamination of Indium, Antimony, Phosphorus Tetramer, and Decaborane Implants

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Molybdenum Contamination of Indium, Antimony, Phosphorus Tetramer, and Decaborane Implants

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  • Author: Raymond Pong, and John Schuur
This paper will demonstrate the failure modes for the contamination of 115In+ beams with Mo and recommend actions to prevent or minimize this contamination. Indium has been explored as a low diffusivityi,ii replacement for boron. Low solid solubilities make it unsuitable for the formation of shallow source drains and emitters. However, it remains viable for VT and Base implants.

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