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Understanding The Calibration Methodology for The Axcelis GSD/HE Final Energy Magnet And A Means for Manipulating The Calibration Curve

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Understanding The Calibration Methodology for The Axcelis GSD/HE Final Energy Magnet And A Means for Manipulating The Calibration Curve

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  • Author: Ronald Johnson, John Schuur
This paper presents the physical equations and mathematical model used by the HE control system to control the FEM magnetic field as measured by an internal gauss probe. Details of the mathematical model used by the control system to correlate actual gauss probe readings to calculated (theoretical) field strengths is presented. Included is a discussion of the relationship between ion electromagnetic rigidity and magentic field. Finally, a method for directly manipulating the calibration curve of the FEM is discussed as it relates to the specific methodology employed by the HE FEM.

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