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Raman Thermometry of a Silicon Semiconductor Chip

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Raman Thermometry of a Silicon Semiconductor Chip

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Temperature-dependent (TD) Raman microscopy is a powerful and non-destructive method that can probe the thermal and electronic properties of semiconductor materials with sub-micron spatial resolution. In this Application Note, we demonstrate the power of TD Raman microscopy by investigating the temperature-induced phonon mode shifts in a silicon (Si) chip with an Edinburgh Instruments RM5 Confocal Raman Microscope equipped with a temperature stage. We show that Raman thermometry can be used to non-invasively determine the temperature of Si-based devices.

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