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Raman Imaging of Strain in a Silicon Semiconductor Wafer

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Raman Imaging of Strain in a Silicon Semiconductor Wafer

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  • Author: Matthew Berry
Semiconductors are the linchpin of the modern electronics industry. When fabricating semiconductor devices, the number of defects in the constituent semiconductor materials must be tightly controlled. In this Application Note, an Edinburgh Instruments RM5 Raman Microscope was used to analyse and image the strain from a defect in a silicon semiconductor wafer.

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