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Model-based Solution for Multigas Mass Flow Control with Pressure Insensitivity

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Model-based Solution for Multigas Mass Flow Control with Pressure Insensitivity

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Thermal sensor-based mass flow controllers (MFC) have been deployed extensively in gas delivery systems throughout wafer fabs, and yet traditional approaches to thermal mass flow-control systems suffer from drawbacks, including slow transient response times, outlet flow deviations in closed-loop configurations, and calibration limits for different gases. In fact, one of the main challenges facing any flow sensor in an MFC is so-called “multigas” capability. Using calibration data for only one gas (usually N2), a technique is required to manipulate the calibration data to obtain accurate flow measurements for any other gas.

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