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Configuring MKS 640/641 Pressure Controllers

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Configuring MKS 640/641 Pressure Controllers

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This procedure is provided as a reference guide to sizing the orifice for most typical applications. To assure proper orifice size selection for the specific application conditions, particularly those where the procedure results in an orifice selection near the limit lines in the graph, please contact MKS Applications Engineers for assistance in selecting the proper valve orifice. The flow through any orifice depends on the size of the orifice, the inlet and outlet pressures, and gas density.

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