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Ammonia (NH3) Contaminant Detection using MultiGas™ Purity Analyzer

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Ammonia (NH3) Contaminant Detection using MultiGas™ Purity Analyzer

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High purity bulk NH3 gas is commonly used in the production of GaN high brightness blue and white LEDs. It has been proven that trace amounts of water and other oxygen containing contaminants in the NH3 gas during metal organic chemical vapor deposition (MOCVD) process adversely affects the yield of the corresponding devices – sometimes by as much as 90%! Several purifiers are on the market today to remove water and other contaminants from the high purity NH3 gas, and a need exists to monitor the gas from the purifier to ensure that the resulting contamination levels are within the low ppb range. Gas chromatography can be used to monitor the impurity levels in the NH3 gas, but this method is not performed in real-time and requires time consuming periodic calibration with specialty gases.

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