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MKS Toroidal Plasma Sources Operation with Hydrogen

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MKS Toroidal Plasma Sources Operation with Hydrogen

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The MKS Paragon® Reactive Gas Generator family of toroidal remote plasma sources (RPS) has traditionally been used to generate fluorine radicals, primarily for chamber cleaning applications. For some processes such as strip over low-k materials and native oxide removal, hydrogen radicals produced by an RPS are desirable. The Paragon RPS is a good solution for production of hydrogen radicals, though operational best practices are somewhat different than those for fluorine chemistry. This application note provides guidelines for the transport of radicals from an RPS to the wafer and operational guidelines for the Paragon H* plasma source when using hydrogen and hydrogen-containing gases.

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