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ASTRON® Remote Plasma Source Ignition Best Practices

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ASTRON® Remote Plasma Source Ignition Best Practices

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The ASTRON® family of remote plasma sources produce reactive gas species for semiconductor device fabrication applications. Reliable ignition of the plasma in the ASTRON depends strongly on the ambient conditions under which the plasma is being struck. Predictable ignition of the plasma can only be achieved when the ignition sequence for the plasma is appropriate for the process conditions and equipment configuration employed in a particular process.

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