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Corrosion Resistant Valve (CRV)

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Corrosion Resistant Valve (CRV)

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Corrosive and/or strongly oxidizing gases are commonly employed in semiconductor CVD and etch processing. Contact of downstream system components with these gases cause metal corrosion that produces unwanted particulate contamination and, ultimately, component failure. In particular, isolation valves are at risk for corrosion induced failure. Process gases directly impinge on the bellows of poppet sealed isolation valves in corrosive service and this frequently leads to premature failure.

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