1.  Home
  2. Whitepapers
  3. Optimized Block Coating For Paragon® Remote Plasma Source

Optimized Block Coating For Paragon® Remote Plasma Source

Download Whitepaper

Optimized Block Coating For Paragon® Remote Plasma Source

Download Whitepaper
The internal surfaces of plasma blocks used in remote plasma reactive gas sources are subjected to a highly reactive plasma environment. As a consequence, surface erosion that occurs can shorten the block lifetime and produce unacceptable particle levels in the processes in which the source is being used. Employing a hard anodized surface treatment prolongs block lifetimes and maintains acceptable particle levels, however, advances in device and process specifications have produced an on-going need for further improvements in these equipment characteristics.

Download Whitepaper Now