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Optimized Loadlock Pressure Sensing with the 901P Transducer

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Optimized Loadlock Pressure Sensing with the 901P Transducer

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Loadlock chamber operational cycles employ automatic sequences of valve and door activations as needed to affect wafer transfers into and out of a processing chamber. Each operational step is gated by the match between a chamber pressure set point and the readings from one or more pressure sensors located on the chamber. Loadlock operations should have no impact on process throughput or wafer quality (i.e. no added particle contamination). Loadlock system design and function focuses primarily on reducing cycle-times and/or minimizing particle events. Achieving these goals simultaneously is challenging since the most effective solutions for cycle-time can negatively affect particle counts and vice versa.

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