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Fluorinated Greenhouse Gas Monitoring in Semiconductor Fabs

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Fluorinated Greenhouse Gas Monitoring in Semiconductor Fabs

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The U.S. Environmental Protection Agency (EPA) has amended its Green House Gas (GHG) Mandatory Reporting rule 40 CFR Part 98i to include GHGs from large sources associated with fluorinated greenhouse gases. Affected facilities must now install GHG monitoring technology to track and report their annual GHG emissions to the EPA. For semiconductor device fabs, the EPA Final Rule for Mandatory Reporting of Greenhouse Gases (40 CFR 98, Subpart I) statesii that facilities that emit greater than or equal to 25,000 metric tons of CO2 equivalent (CO2 e) per year from fluorinated GHGs and N2 O from cleaning processes emissions must collect emission data and calculate the GHG emissions for mandatory reporting.

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