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TOOLweb® Rga Connectivity And Scalability

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TOOLweb® Rga Connectivity And Scalability

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TOOLweb RGA uses the recipe engine built into Process Eye™ Professional to allow collection of data from a variety of sources. Tool data available as VIDs can be polled at various rates depending on the capability of the tool controller and communication port used. Third party sensors can be integrated via RS232, Modbus or utilizing direct digital and analog signals. For more sophisticated sensors with control software, TOOLweb RGA can use a variety of mechanisms to take the processed data into the database in context with the tool and wafer logistics. Once the live sensor data is taken into TOOLweb RGA, all of the normal alarm condition checking and actions are available.

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