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Minimizing Fluorine-induced Drift In Capacitance Manometers

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Minimizing Fluorine-induced Drift In Capacitance Manometers

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Etch processes that employ fluorine or fluorine-bearing gases can experience a transient burn-in effect that produces an initial drift in the output signal from standard capacitance manometer vacuum sensors. This transient is due to non-uniform changes in the surface of the process-facing sensing diaphragm in the manometer. This Application Note discusses the root causes of this transient behavior and presents the unique design characteristics of the pressure sensor in the E28 and DA02 Baratron heated, absolute capacitance manometers that address this issue.

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