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Leveraging IIoT for Edge Analytics and the Semiconductor Smart Fab

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Leveraging IIoT for Edge Analytics and the Semiconductor Smart Fab

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The production and quality control tools in modern semiconductor fabrication plants (fabs) are all highly instrumented with analytical sensors and actuators monitoring and manipulating the many equipment components of the tools, monitoring equipment and process states. Almost all of these sensors and actuators are smart devices that have some level of on-board data handling and digital communications capability. This means that each production tool in a semiconductor fab is generating huge amounts of equipment and process state data on a continuous basis. Often, within a single process tool, this torrent of data is being transmitted to the tool controller using multiple fieldbus protocols. The communication protocol used by a sensor or actuator depends on the manufacturer of the device and process tool OEMs source these devices from different manufacturers.

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