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R-series Gate Valve: Preventing Out-of-Sequence Actuation With Lockout/tagout And Position Indicators

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R-series Gate Valve: Preventing Out-of-Sequence Actuation With Lockout/tagout And Position Indicators

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The correct sequencing of the opening and closing of the gate valve on the subfab roughing pump is critical for optimal process results. Improper sequencing of this valve can result in significant, rapid, and unwanted changes in process pressure that yield unpredictable process results and gas flow turbulence that produces high defect counts on in-process substrates. Equally important is the pressure shockwave created when a roughing pump gate valve opens at excessively high process pressures or the pressure rise that occurs with an out-of-sequence closure of the gate valve while there is significant gas flow; both can seriously damage delicate and expensive components in the process tool (e.g., pumps, mechanical components, UHV gauges).

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