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AMDS-1000 for PVD Arc Monitoring and Detection

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AMDS-1000 for PVD Arc Monitoring and Detection

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MKS’ AMDS-1000 system provides fast, reliable and comprehensive plasma monitoring and detection of arcing events. The system can monitor arc events ranging from transient arcs that occur over a few microseconds to hard arcs that last over 100 microseconds, providing combined arc monitoring and detection capability during the entire plasma process. AMDS-1000 modules communicate with the serial interface of the DC generator to poll arc event and power information, and connect to the analog control interface of the generator to collect the voltage and power information using high-speed analog signal acquisition for real-time DC arc monitoring and detection.

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