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Dissolved Gases in Di Water Advanced Cleaning Solutions

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Dissolved Gases in Di Water Advanced Cleaning Solutions

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Electrostatic charge (ESC) build-up occurs at the interface between a flowing, insulating fluid and a solid surface. For example, the friction between an insulated liquid and the pipe through which it flows produces static electrical potentials up to several tens of kilovolts. This phenomenon is important for semiconductor fabs since single wafer cleaning tools use flowing insulating UPW (18 MWcm) to rinse wafer surfaces leaving a residual static charge that must be controlled to avoid device damage from microcontamination and/or ESD.

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