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Infrared Gas Analyzers for on-site Process Gas Blending Applications

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Infrared Gas Analyzers for on-site Process Gas Blending Applications

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Semiconductor, LED, and solar panel manufacturing processes use specialty gases such as SiH4, Si2H6, B2H6, GeH4, PH3, or AsH3 dopant compounds in an inert gas matrix (H2, etc.). In many instances, these gases need to be delivered in mixtures containing repeatable, ppm-level concentrations of one gas (the dopant) in another gas (the matrix gas, also labeled as diluent). Historically, these gas mixtures have been supplied as pre-mixed gases in high pressure cylinders. There are several issues with this approach that need to be resolved including the high cost of the pre-mixed cylinders, the requirement for frequent cylinder changes which increases transportation, storage, maintenance costs, safety risks, and contamination risks, and occasional problems with the repeatability and accuracy of the pre-mix cylinder concentrations, which can have detrimental effects on the process.

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