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Eliminate Particle Contamination Caused by Pump Failure

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Eliminate Particle Contamination Caused by Pump Failure

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The selection of the isolation valve in applications exhibiting harsh process conditions and an increased possibility for vacuum pump failure is critical for avoiding significant yield and monetary loss since isolation valve closing time can directly impact process particle contamination. While off-the-shelf standard products may offer lower upfront costs, such valves may not protect the product under process when a pump failure occurs. MKS Instruments’ Rapid Isolation Valves offer significantly faster actuation speeds, high conductance, heating, and the reliability that customers expect from MKS Jalapeno and High Flow Valve products. The dramatic reduction in closing speed with MKS Rapid Isolation Valves protect the chamber from particulate back streaming, reducing tool downtime, and the need to scrap valuable product. For semiconductor fabs and other end users of semiconductor process tools, the investment in Rapid Isolation Valves can provide positive returns after just a single pump failure event.

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