High-power, nanosecond-pulse q-switch laser technology with flattop beam-shaping technique for efficient industrial laser processing

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High-power, nanosecond-pulse q-switch laser technology with flattop beam-shaping technique for efficient industrial laser processing

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  • Author: Jim Bovatsek and Rajesh S. Patel
In this work, we have illustrated that high-quality; high-efficiency machining can be achieved using the new Pulseo™ industrial q-switched 355-nm laser system combined with state-of-the-art flattop beam shaping technology. In the case of thin (~150nm) film ITO removal, it was demonstrated that the flattop beam shape can improve the area removal rate by a factor of 2.3. For a given desired scribe width, this means that ITO scribing with a flattop beam can be executed at greater than twice the scanning speed compared to a Gaussian beam. Also flattop beam machining produced very clean and sharp edged scribe without any unablated area left behind near the edges of the scribe. Furthermore, the “fluence-containment” offered by the flattop intensity distribution resulted in less collateral damage to the underlying glass substrate.

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